Entegris Announces New Post-CMP Cleaning Solutions for Advanced Semiconductor Manufacturing
BILLERICA, Mass., 2016-01-26 16:39 CET (GLOBE NEWSWIRE) --
Entegris, Inc. (NASDAQ:ENTG), a leader in yield-enhancing materials and solutions for highly advanced manufacturing environments, today announced new post-chemical mechanical planarization (post-CMP) cleaning solutions for semiconductor manufacturing. The new PlanarClean® AG family of products were designed for use in 10 nm processes and below, and add to Entegris’ leading portfolio of post-CMP cleaning solutions.
“Entegris has been the industry leader in post-CMP cleaning for many years. Our PlanarClean family products have been widely used in wafer fabs around the world. To address greater complexity of wafer production at the leading-edge nodes due to the addition of many new materials, such as cobalt and tungsten, we carefully re-formulated our PlanarClean solution to provide superior cleaning without damaging advanced films or new materials,” said Cuong Tran, director of post-CMP cleans for Entegris. “PlanarClean AG meets the needs for advanced processes, while also conforming to new safety guidelines outlined by our customers.”
The CMP process in silicon wafer production consists of a mechanical polishing step which utilizes a chemical slurry formulation to remove unwanted conductive or dielectric materials from the surface of the integrated device, achieving a flat and smooth surface upon which additional layers of integrated circuitry are built. The post-CMP cleaning step removes nanoparticles to minimize potential wafer defects while maintaining the integrity of the layers of materials already in place.
Changes to the number and types of films and materials exposed during cleaning in advanced processes have highlighted a need for specifically formulated cleans. In addition, changes to the particles used in slurries have rendered many of the traditional post-CMP cleaners ineffective and inefficient for leading-edge technologies, specifically in Front-End-of-Line (FEOL) processes. These challenges are now pushing semiconductor manufacturers to consider formulated cleans over commodity cleans.
PlanarClean AG formulated solutions meet these needs by providing one-step, superior cleaning in advanced processes that include copper, cobalt and tungsten, while protecting the underlying thin films and materials. Its proprietary formulation offers increased performance through enhanced reliability and yield, low to zero corrosion and defects and increased queue time. In addition, PlanarClean AG provides a cost-of-ownership advantage by reducing the amount of chemistry required in the cleaning step, and meets the latest EHS safety requirements for fab chemistries. The products have been successfully evaluated in multiple leading-edge fabs and are currently available to all customers.
For more information, please visit the Entegris booth at SEMICON® Korea, Hall D, Booth #5612, through Friday, January, 29th, or contact your local Entegris representative or visit www.entegris.com.
Entegris is a leading provider of a wide range of products for purifying, protecting, and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information may be found at www.entegris.com.
Entegris®, Entegris Rings Design®, Creating a Material Advantage® and PlanarClean® are all trademarks of Entegris, Inc. SEMICON® is a trademark of Semiconductor Equipment and Materials International Corporation.
Brand & Marcom Mgr.
T +1 480 290 8748
Om NASDAQ OMX
NASDAQ OMX (NASDAQ: NDAQ) is a leading provider of trading, exchange technology, information and public company services across six continents.
Følg saker fra NASDAQ OMX
Registrer deg med din epostadresse under for å få de nyeste sakene fra NASDAQ OMX på epost fortløpende. Du kan melde deg av når som helst.
Siste saker fra NASDAQ OMX
XBiotech Announces First Patient in Study Evaluating MABp1 in Combination with Onivyde® and 5-fluorouracil/folinic acid for the Treatment of Pancreatic Cancer18.10.2017 16:53 | Pressemelding
AUSTIN, Texas, Oct. 18, 2017 (GLOBE NEWSWIRE) -- XBiotech Inc. (NASDAQ:XBIT) announced today enrollment of the first patient into a Phase I single arm study evaluating the maximum tolerated dose of Onivyde® (Irinotecan liposome injection) and 5-fluorouracil/folinic acid in combination with MABp1 in a cohort of patients with advanced pancreatic adenocarcinoma and cachexia. The patient has begun treatment at Cedars-Sinai Medical Center under the care of Dr. Andrew Hendifar, the Study's Principle Investigator, Medical Oncology lead for the Gastrointestinal Disease Research Group and Co-Director of Pancreas Oncology at Cedars-Sinai. A total of 16 patients are expected to be enrolled in the study. Dr. Hendifar commented, "We are excited to enroll our first patient in this novel combinatorial therapy for the treatment of advanced pancreatic cancer and cachexia. This is the first attempt to add an anti-inflammatory therapy to standard chemotherapy in an effort to improve the performanc
Nasdaq and SGX Establish Collaborative Listings Agreement18.10.2017 15:42 | Pressemelding
NEW YORK and SINGAPORE, Oct. 18, 2017 (GLOBE NEWSWIRE) -- Nasdaq Inc. (Nasdaq:NDAQ) and Singapore Exchange (SGX) today announced the signing of a collaborative agreement in a move to leverage their strengths as two of the leading listings venues in the U.S. and Asia respectively. The new agreement seeks to enhance the channels available for companies to access capital market funding and enhance their corporate profile in both markets. As part of this agreement, Nasdaq and SGX -- who also share a successful, long-term market technology relationship -- are currently exploring the demand among corporates for a concurrent or sequential listing on both exchanges. Nasdaq and SGX are committed to supporting companies that are interested in pursuing this route. "The business landscape today is borderless," said Loh Boon Chye, CEO, SGX. "Fast-growing Asian companies looking to tap the capital markets can choose to list on SGX on Asian home ground, and embark on a listing on Nasdaq
Colliers International Expands in Washington, D.C.18.10.2017 14:30 | Pressemelding
Acquisition of Beltway Real Estate Services Firm Strengthens Ongoing Commitment to the Region TORONTO and WASHINGTON, Oct. 18, 2017 (GLOBE NEWSWIRE) -- Leading global commercial real estate services firm Colliers International Group Inc. (NASDAQ:CIGI)(TSX:CIGI) announced today the acquisition of leading tenant representation advisory firm Serten Advisors. With its office in Tysons Corner, the firm serves global, national, and regional clients with a highly skilled and experienced team of professionals that have more than 100 years of combined experience. "This strategic acquisition positions Colliers to gain additional market share and win new business in the vibrant and competitive Suburban DC markets," said Marty Pupil, Colliers International President | U.S. Brokerage. "Adding Steve and Paul and the rest of their talented leadership team to our existing group of professionals in the region will further position Colliers as the commercial real estate services firm of
InSphero to Present Novel 3D Human Liver Fibrosis Model at Annual Liver Meeting® in Washington, DC18.10.2017 14:00 | Pressemelding
InSphero AG / InSphero to Present Novel 3D Human Liver Fibrosis Model at Annual Liver Meeting® in Washington, DC . Processed and transmitted by Nasdaq Corporate Solutions. The issuer is solely responsible for the content of this announcement. New 3D InSight(TM) Human Liver Fibrosis Model represents a powerful tool for screening efficacy and safety of anti-fibrotic drugs in vitro. Schlieren, Switzerland, Oct. 18, 2017 (GLOBE NEWSWIRE) -- InSphero AG, the leading supplier of assay-ready 3D cell culture models for accelerating drug discovery and development, will present data characterizing and demonstrating the utility of its new 3D InSight(TM) Human Liver Fibrosis Model for screening efficacy of anti-fibrotic drugs. The findings will be presented at oral and poster presentations this Friday at the annual meeting of the American Association for the Study of Liver Disease (AASLD) Conference in Washington, DC. Anti-fibrotic therapi
Kofax Wins "Most Innovative Solution for Banking Customer Authentication" Award for Third Consecutive Year18.10.2017 08:00 | Pressemelding
Grand Prix Banque & Innovation Honor Recognizes Kofax Mobile ID Customer Onboarding Solution and its Anti-Fraud Capabilities IRVINE, Calif., Oct. 18, 2017 (GLOBE NEWSWIRE) -- Kofax ®, a leading provider of software to simplify and transform the First Mile(TM) of business, today announced that Kofax Mobile ID(TM) has won "Most Innovative Solution for Banking Customer Authentication" in the 2017 Grand Prix Banque & Innovation Awards in Paris, France. Now in its fourth year, the Awards identify excellence and innovation in the banking sector. The program acknowledges technology companies that have launched and implemented the most outstanding banking-related software solutions, initiatives and projects in France over the past twelve months. This award highlights the new facial recognition and ID verificationfeatures of Kofax Mobile ID that determine the authenticity and validity of identification documents and their holders.
World Conference on Lung Cancer Wednesday Press Conference: PD-1/PD-L1 Advancements and Interventions to Prevent and Treat Lung Cancer18.10.2017 06:25 | Pressemelding
YOKOHAMA, Japan, Oct. 18, 2017 (GLOBE NEWSWIRE) -- The final press conference from the International Association for the Study of Lung Cancer (IASLC) 18th World Conference on Lung Cancer (WCLC) highlighted new advancements surrounding the discovery of PD-1 and PD-L1, including a discussion from the researcher credited with discovering PD-1, as well as interventions to prevent lung cancer and improve quality of life for lung cancer patients. Innovations in lung cancer treatment linked to the discovery of PD-1 Prof. Tasuku Honjo of Japan, who was the first to identify PD-1 in 1992, shared an update on how PD-1 blockers have been widely used to treat many types of cancers. After decades of study, research into PD-1 has led to breakthrough immunotherapy treatments that are being hailed as a "penicillin moment" in cancer treatment. "I believe that, just as a number of antibiotics developed in the wake of the discovery of penicillin now p
I vårt presserom finner du alle våre siste saker, kontaktpersoner, bilder, dokumenter og annen relevant informasjon om oss.Besøk vårt presserom